Webb• Bulk CMP slurry filtration • Point-of-use (POU) slurry filtration FEATURES & BENEFITS Patented, multilayer media Provides high retention, helping to reduce wafer defects and improve yield Media design absorbs fine particles Minimizes inefficient post-CMP clean, increasing overall COO Webb1 okt. 2003 · A powerful method to prevent large slurry particles from slurry inflow is to install a tighter depth filter at the point of use (POU). But it is impossible to completely prevent defect-causing particles through the POU filter. Thus it is necessary to optimize the slurry flow rate in order to overcome this weak point of the POU depth-type filter.
Do You Know How to Filter CMP Slurry in Semiconductor Industry?
WebbParker's Fulflo® CMP Slurry-MateTM Filter Cartridges provide uniform slurry delivery while optimizing the chemical mechanical planarization of wafer interlayer dielectric (ILD) and … WebbThe cartridges are thermally bonded from 100% virgin polypropylene to ensure low extractables and chemical compatibility with both acidic and alkaline slurries. Confi … inciting incident vs catalyst
What is the best filtration for a slurry? CMP Library
WebbThey are suitable for filtering liquids at elevated temperatures and high flow rates, and for corrosive liquids. Synthetic fabrics made from polymeric materials such as polyester, nylon, polypropylene, and fluoropolymers such as PVDF and PTFE. These fabrics may be monofilament and multifilament. WebbIn addition to our pleated cartridge replacement filters, STT offers you the following dust filtration solutions. Air Filter Bags Available in a variety of filtering media, coatings, and finishes, STT supplies a complete line of quality replacement and custom filter bags designed to fit most manufacturers' shaker-type and reverse air collector-type dust … Webbtridges. Four 20" filter cartridges (8, 10" filter mod-ules) meet your requirements. The part number for your filter cartridge would be: R2F400 The part number stands for: R: style-retrofit 2: 20" length F400: 40 µm absolute rated, polypropylene Profile II medium Ordering Information Table 1 – Maximum Operating Conditions inciting influence crossword clue